Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. - Uwe Brand; Min Xu; Lutz Doering; Jannick Langfahl-Klabes; Heinrich Behle; Sebastian Bütefisch; Thomas Ahbe; Erwin Peiner; Stefan Völlmeke; Thomas Frank; Bodo Mickan; Ilia Kiselev; et al. (Sensors, 2019)