Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology. - Helia Hooshmand; Tobias Pahl; Poul Erik Hansen; Liwei Fu; Alexander Birk; Mirza Karamehmedovic; Peter Lehmann; Stephan Reichelt; Richard K. Leach; Samanta Piano (J. Comput. Phys., 2025)