Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor. - Matthew Tom; Sungil Yun; Henrik Wang; Feiyang Ou; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2022)

Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation. - Matthew Tom; Henrik Wang; Feiyang Ou; Sungil Yun; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2023)

Machine Learning-Based Endpoint-Detection Control System for an Atomic Layer Etching Process. - Henrik Wang; Feiyang Ou; Gerassimos Orkoulas; Panagiotis D. Christofides (ACC, 2025)