Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate. - Koji Koyama; Hideo Aida; Michio Uneda; Hidetoshi Takeda; Seong-Woo Kim; Hiroki Takei; Tsutomu Yamazaki; Toshiro Doi (Int. J. Autom. Technol., 2014)

Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher. - Michio Uneda; Keiichi Takano; Koji Koyama; Hideo Aida; Ken-Ichi Ishikawa (Int. J. Autom. Technol., 2015)

Patterned Sapphire Substrates for III-Nitride Epitaxial Growth. - Natsuko Omiya; Hideo Aida; Yutaka Kimura; Yuki Kawamata; Seong-Woo Kim; Michio Uneda (Int. J. Autom. Technol., 2018)