A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions. - Yuki Shimizu; Satoshi Kataoka; Tatsuya Ishikawa; Yuan-Liu Chen; Xiuguo Chen; Hiraku Matsukuma; Wei Gao 027 (Sensors, 2018)

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors. - Yuki Shimizu; Hiraku Matsukuma; Wei Gao 027 (Sensors, 2019)

Fabrication of a Two-Dimensional Diffraction Grating with Isolated Photoresist Pattern Structures. - Hiraku Matsukuma; Masanori Matsunaga; Kai Zhang; Yuki Shimizu; Wei Gao 027 (Int. J. Autom. Technol., 2020)

Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source. - Hiraku Matsukuma; Ryo Sato; Yuki Shimizu; Wei Gao 027 (Int. J. Autom. Technol., 2021)

An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation. - Wijayanti Dwi Astuti; Hiraku Matsukuma; Masaru Nakao; Kuangyi Li; Yuki Shimizu; Wei Gao 027 (Sensors, 2021)

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer. - Xin Xiong; Yuki Shimizu; Hiraku Matsukuma; Wei Gao 027 (Sensors, 2021)

Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction. - Lue Quan; Yuki Shimizu; Ryo Sato; Dong Wook Shin; Hiraku Matsukuma; Andreas Archenti; Wei Gao 027 (Int. J. Autom. Technol., 2022)

A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range. - Yifan Hong; Ryo Sato; Yuki Shimizu; Hiraku Matsukuma; Wei Gao 027 (Sensors, 2022)

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range. - Yifan Hong; Ryo Sato; Yuki Shimizu; Hiraku Matsukuma; Hiroki Shimizu; Wei Gao 027 (Sensors, 2022)

Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer. - Xin Xiong; Chenguang Yin; Lue Quan; Ryo Sato; Hiraku Matsukuma; Yuki Shimizu; Hideaki Tamiya; Wei Gao 027 (Sensors, 2022)

Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser. - Tao Liu 053; Jiucheng Wu; Amane Suzuki; Ryo Sato; Hiraku Matsukuma; Wei Gao 027 (Sensors, 2023)

Repetition Frequency Control of a Mid-Infrared Ultrashort Pulse Laser. - Hiraku Matsukuma; Masashi Nagaoka; Hisashi Hirose; Ryo Sato; Yuki Shimizu; Wei Gao 027 (Int. J. Autom. Technol., 2024)

On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by Using a Differential Angle Sensor. - Jiucheng Wu; Yifan Hong; Dong Wook Shin; Ryo Sato; Lue Quan; Hiraku Matsukuma; Wei Gao 027 (Int. J. Autom. Technol., 2024)

Enhanced Data-Processing Algorithms for Dispersive Interferometry Using a Femtosecond Laser. - Tao Liu 053; Hiraku Matsukuma; Amane Suzuki; Ryo Sato; Wei Gao 027 (Sensors, 2024)

Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder. - Ryo Sato; Tao Liu 053; Satoru Maehara; Ryota Okimura; Hiraku Matsukuma; Wei Gao 027 (Int. J. Autom. Technol., 2024)

An Improved Data Processing Algorithm for Spectrally Resolved Interferometry Using a Femtosecond Laser. - Tao Liu 053; Hiraku Matsukuma; Amane Suzuki; Ryo Sato; Wei Gao 027 (Sensors, 2024)