Automated visual inspection for lsi water multilayer patterns by cascade pattern matching algorithm. - Shunji Maeda; Hitoshi Kubota; Hiroshi Makihira; Takanori Ninomiya; Yasuo Nakagawa; Yuzo Taniguchi (Syst. Comput. Jpn., 1990)

Optimum threshold generation for automated visual inspection of large-scale integration wafer patterns. - Shunji Maeda; Hitoshi Kubota; Hiroshi Makihira (Syst. Comput. Jpn., 1996)

Threshold setting assisted by numerical analysis methods in automatic visual inspection using gray-scale image comparison. - Shunji Maeda; Fumiaki Endo; Hiroshi Makihira; Hitoshi Kubota (Syst. Comput. Jpn., 1998)