Precise Visual Inspection Algorithm for LSI Wafer Patterns Using Grayscale Image Comparison. - Yukio Matsuyama; Hisafumi Iwata; Hitoshi Kubota; Yasuo Nakagawa (MVA, 1988)

Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm. - Yukio Matsuyama; Hisafumi Iwata; Hitoshi Kubota; Yasuo Nakagawa (Syst. Comput. Jpn., 1990)

Thin Film Magnetic Head Wafer Inspection Technique Using Geometrical Feature Based Image Comparison. - Atsushi Shimoda; Hisafumi Iwata; Yukihiro Shibata; Hidehiro Ikeda (MVA, 1998)

Repair Yield Simulation with Iterative Critical Area Analysis for Different Types of Failure. - Yuichi Hamamura; Kazunori Nemoto; Takaaki Kumazawa; Hisafumi Iwata; Kousuke Okuyama; Shiro Kamohara; Aritoshi Sugimoto (DFT, 2002)