Fringe Gate Leakage of 28nm HK/MG nMOSFETs with Nitridation Treatments. - De-Cheng Zhang; Ching-Chuan Chou; Ho-Hsiang Chen; Shang-Ze Chen; Jian-Ming Chen; Hui-Yun Bor; Wen-How Lan; Mu-Chun Wang (ICKII, 2020)