Nonlinear Variation Decomposition of Neural Networks for Holistic Semiconductor Process Monitoring. - Hyeok Yun; Hyundong Jang; Seunghwan Lee; Junjong Lee; Kyeongrae Cho; Seungjoon Eom; Soomin Kim; Choong-Ki Kim; Hong-Chul Byun; Seongjoo Han; Min-Soo Yoo; Rock-Hyun Baek (Adv. Intell. Syst., 2024)