Astigmatic Detection System With Feedback Mechanism for Calibrating Driving Waveform of Piezoelectric Actuators. - Hsien-Shun Liao; Zheng-Rong Guo; Hong-Sheng Tan; Kuangyuh Huang; Ing-Shouh Hwang; En-Te Hwu (IEEE Trans. Instrum. Meas., 2023)