3DIC with Stacked FinFET, Inter-Level Metal, and Field-Size (25×33mm2) Single-Crystalline Si on SiO2 by Elevated-Epi. - Bo-Jheng Shih; Yu-Ming Pan; Hao-Tung Chung; Chieh-Ling Lee; I-Chun Hsieh; Nein-Chih Lin; Chih-Chao Yang; Po-Tsang Huang; Hung-Ming Chen; Chiao-Yen Wang; Huan-Yu Chiu; Huang-Chung Cheng; et al. (VLSI Technology and Circuits, 2024)