Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate. - Chengwu Wang; Syuhei Kurokawa; Julong Yuan; Li Fan; Huizong Lu; Zhe Wu; Weifeng Yao; Kehua Zhang; Yu Zhang; Toshiro Doi (Int. J. Autom. Technol., 2018)