12.2 A 7nm FinFET SRAM macro using EUV lithography for peripheral repair analysis. - Taejoong Song; Hoonki Kim; Woojin Rim; Yongho Kim; Sunghyun Park 003; Changnam Park; Minsun Hong; Giyong Yang; Jeongho Do; Jinyoung Lim; Seungyoung Lee; Ingyum Kim; et al. (ISSCC, 2017)