Discovering deposition process regimes: leveraging unsupervised learning for process insights, surrogate modeling, and sensitivity analysis. - Geremy Loachamín Suntaxi; Paris Papavasileiou; Eleni D. Koronaki; Dimitrios G. Giovanis; Georgios Gakis; Ioannis G. Aviziotis; Martin Kathrein; Gabriele Pozzetti; Christoph Czettl; Stéphane P. A. Bordas; Andreas G. Boudouvis (CoRR, 2024)