Low temperature deposition of SiNx thin films by the LPCVD method. - Zdenko Tijanic; Davor Ristic; Mile Ivanda; Ivancica Bogdanovic-Rakovic; Marijan Marcius; Mira Ristic; Ozren Gamulin; Svetozar Music; Kresimir Furic; Alessandro Chiasera; Maurizio Ferrari; Giancarlo Cesare Righini (MIPRO, 2011)