Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims. - Chen-Kuei Chung; J. J. Jhu (NEMS, 2009)

Evolution of mechanical property of nanocomposite TiSiN films using reactive magnetron cosputtering. - Chen-Kuei Chung; J. J. Jhu; S. C. Chang; B. H. Wu (NEMS, 2010)