Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors. - Tom Schram; L.-Å. Ragnarsson; G. S. Lujan; W. Deweerd; J. Chen; W. Tsai; K. Henson; R. J. P. Lander; J. C. Hooker; J. Vertommen (Microelectron. Reliab., 2005)