Low-Drift Flow Sensor with Zero-Offset Thermopile-Based Power Feedback - Marcel B. Dijkstra; Theo S. J. Lammerink; Meint De Boer; J. W. Berenschot; Remco J. Wiegerink; Miko Elwenspoek (CoRR, 2008)

Self-Assembled Three-Dimensional Non-Volatile Memories. - Leon Abelmann; Niels R. Tas; Erwin Berenschot; Miko Elwenspoek (Micromachines, 2010)

High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. - Edin Sarajlic; Christophe Yamahata; Erwin Berenschot; Niels R. Tas; Hiroyuki Fujita; Gijs J. M. Krijnen (Micromachines, 2010)

Dimensional control in corner lithography for wafer-scale fabrication of nano-apertures. - Narges Burouni; Erwin Berenschot; Miko Elwenspoek; Niels R. Tas (NEMS, 2011)

Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. - Antoine Legrain; T. G. Janson; J. W. Berenschot; Gijs J. M. Krijnen; Leon Abelmann; Niels R. Tas (NEMS, 2013)

Fabrication of 2D-extruded fractal structures using repeated corner lithography and etching. - Erwin Berenschot; Hadi Yagubizade; Henri V. Jansen; Marcel B. Dijkstra; Niels R. Tas (NEMS, 2014)

Nanopores created using an internal shadowmask process. - Lennart J. de Vreede; J. W. Berenschot; Niels R. Tas; Wesley T. E. van den Beld; Josh T. Loessberg-Zahl; Albert van den Berg; Jan C. T. Eijkel (NEMS, 2016)

Wafer-scale nanostructure formation inside vertical nano-pores. - J. W. Berenschot; X. Sun; Hai Le The; R. M. Tiggelaar; M. J. de Boer; Jan C. T. Eijkel; J. G. E. Gardeniers; Niels R. Tas; Edin Sarajlic (NEMS, 2017)