A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process. - Dongil Cho; Hyoungho Ko; Jongpal Kim; Sangjun Park 001; Donghun Kwak; Taeyong Song; William Carr; James Bus (Int. J. Comput. Eng. Sci., 2003)