Time Series Fault Prediction in Semiconductor Equipment Using Recurrent Neural Network. - Javeria Muhammad Nawaz; Muhammad Zeeshan Arshad; Sang Jeen Hong (ISNN (2), 2013)

Fault Detection in the Semiconductor Etch Process Using the Seasonal Autoregressive Integrated Moving Average Modeling. - Muhammad Zeeshan Arshad; Javeria Muhammad Nawaz; Sang Jeen Hong (J. Inf. Process. Syst., 2014)