Fault Detection on Variable Length Multivariate Time Series from Semiconductor Manufacturing. - Philip Tchatchoua; Guillaume Graton; Mustapha Ouladsine; Jean-François Christaud (SENSORS, 2023)

Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment. - Philip Tchatchoua; Guillaume Graton; Mustapha Ouladsine; Jean-François Christaud (Sensors, 2023)