Atomic Layer Deposition Optimization Using Convolutional Neural Networks. - Julian Cagnazzo; Osama Sam Abuomar; Angel Yanguas-Gil; Jeffrey W. Elam (CSCI, 2021)

Machine learning and atomic layer deposition: predicting saturation times from reactor growth profiles using artificial neural networks. - Angel Yanguas-Gil; Jeffrey W. Elam (CoRR, 2022)

Benchmarking large language models for materials synthesis: the case of atomic layer deposition. - Angel Yanguas-Gil; Matthew T. Dearing; Jeffrey W. Elam; Jessica C. Jones; Sungjoon Kim; Adnan Mohammad; Chi Thang Nguyen; Bratin Sengupta (CoRR, 2024)

Surrogate models to optimize plasma assisted atomic layer deposition in high aspect ratio features. - Angel Yanguas-Gil; Jeffrey W. Elam (CoRR, 2025)