Enabling Alternating Phase Shifted Mask Designs for a Full Logic Gate Level: Design Rules and Design Rule Checking. - Lars Liebmann; Jennifer Lund; Fook-Luen Heng; Ioana Graur (DAC, 2001)

Application of automated design migration to alternating phase shift mask design. - Fook-Luen Heng; Lars Liebmann; Jennifer Lund (ISPD, 2001)