Design and fabrication of a micro-electromechanical system sandwich capacitive accelerometer. - Xiaofeng Zhou 002; Youling Lin; Lufeng Che; Xiaolin Li; Jian Wu 026; Yuelin Wang (NEMS, 2014)

A MEMS accelerometer with double-sided symmetrical folded-beams on single wafer. - Wei Li 178; Xiaofeng Zhou 002; Jian Wu 026; Youling Lin; Ze Wang; Lu feng Che (NEMS, 2017)