Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. - Jian Yang 025; Chaowei Si; Guowei Han; Meng Zhang; Liuhong Ma; Yongmei Zhao; Jin Ning (Micromachines, 2015)

Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications. - Meng Zhang; Jian Yang 025; Chaowei Si; Guowei Han; Yongmei Zhao; Jin Ning (Micromachines, 2015)

Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via. - Meng Zhang; Jian Yang 025; Yurong He; Fan Yang; Fuhua Yang; Guowei Han; Chaowei Si; Jin Ning (Sensors, 2019)