A High-Accuracy Ultrasonic Gas Flowmeter Based on Scandium-Doped Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers. - Hanzhe Liu; Xiangyang Wang; Chongbin Liu; Yuzhe Lin; Lujiang Zhang; Hui Zhao; Xiaofei Cui; Jianke Feng; Guoqiang Wu; Jifang Tao (IEEE Trans. Instrum. Meas., 2024)