A parametric study of ICP-RIE etching on a lithium niobate substrate. - Chun-Ming Chang; Chih-Sheng Yu; Fan-Chun Hsieh; Chun-Ting Lin; Tsung-Tao Huang; Ping-Hung Lin; Jiann-Shiun Kao; Chien-Nan Hsiao; Ming-Hua Shiao (NEMS, 2015)