High Q-factor CMOS-MEMS inductor - Ching-Liang Dai; Jin-Yu Hong; Mao-Chen Liu (CoRR, 2008)

Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques. - Ming-Zhi Yang; Ching-Liang Dai; Jin-Yu Hong (Sensors, 2011)