High-Sensitivity 4H-Silicon Carbide MEMS Pressure Sensors for Extreme Temperature Ranges of -75 °C to 600 °C. - Lukang Wang; Yu Yang; Yabing Wang; Jinglan Huo; Nuo Wan; You Zhao; Yi Lyu; Yulong Zhao; Ming Liu (IEEE Trans. Instrum. Meas., 2025)