A novel polygon-based circuit extraction algorithm for full custom designed MEMS sensors. - Axel Hald; Johannes Seelhorst; Mathias Reimann; Jürgen Scheible; Jens Lienig (SMACD, 2016)

A new method for the analysis of movement dependent parasitics in full custom designed MEMS sensors. - Axel Hald; Johannes Seelhorst; Pekka Herzogenrath; Jürgen Scheible; Jens Lienig (SMACD, 2017)

Full custom MEMS design: A new method for the analysis of motion-dependent parasitics. - Axel Hald; Pekka Herzogenrath; Jürgen Scheible; Jens Lienig; Johannes Seelhorst; Peter Brandl (Integr., 2018)

Parasitic Extraction Methodology for MEMS Sensors with Active Devices. - Axel Hald; Robert Wolf; Johannes Seelhorst; Jürgen Scheible; Jens Lienig; Stefan Tibus; Mike Schwarz (SMACD, 2019)