Errata. - Byron Dom; Virginia H. Brecher; Raymond Bonner; John S. Batchelder; Robert S. Jaffe (Mach. Vis. Appl., 1988)

The P300: A system for automatic patterned wafer inspection. - Byron Dom; Virginia H. Brecher; Raymond Bonner; John S. Batchelder; Robert S. Jaffe (Mach. Vis. Appl., 1988)