Impact of time bound constraints and batching on metallization in an opto-semiconductor fab. - Falk Stefan Pappert; Tao Zhang 044; Oliver Rose; Fabian Suhrke; Jonas Mager; Thomas Frey (WSC, 2016)

Simulation based approach to calculate utilization limits in Opto semiconductor frontends. - Falk Stefan Pappert; Oliver Rose; Fabian Suhrke; Jonas Mager (WSC, 2017)