Monitoring Semiconductor Residue Deposits Using Graph Neural Networks. - Minho Jeon; Anil Kumar Khambampati; Keun Joong Yoon; Jong Hyun Song; Seok Jun Ko; Kyung Youn Kim (ICEIC, 2025)

Industrial Monitoring of Residue Deposition in Semiconductor Process Exhaust Pipelines Using Electrical Capacitance Measurements. - Minho Jeon; Anil Kumar Khambampati; Jong Hyun Song; Keun Joong Yoon; Kyung Youn Kim (IEEE Access, 2025)