MEMS packaging and reliability: An undividable couple. - Harrie A. C. Tilmans; Jeroen De Coster; Philippe Hélin; Vladimir Cherman; Anne Jourdain; Piet De Moor; Bart Vandevelde; Nga P. Pham; Joseph Zekry; Ann Witvrouw; Ingrid De Wolf (Microelectron. Reliab., 2012)