A Low Contact Force Polishing System for Micro Molds that Utilizes 2-Dimensional Low Frequency Vibrations (2DLFV) with Piezoelectric Actuators (PZT) and a Mechanical Transformer Mechanism. - Sze Keat Chee; Hirofumi Suzuki; Junchi Uehara; Takeshi Yano; Toshiro Higuchi; Weimin Lin (Int. J. Autom. Technol., 2013)