Improvement of principal component analysis modeling for plasma etch processes through discrete wavelet transform and automatic variable selection. - Daegeun Ha; Damdae Park; Junmo Koo; Kye Hyun Baek; Chonghun Han (Comput. Chem. Eng., 2016)

Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control. - Junmo Koo; Daegeun Ha; Damdae Park; Hyun-Joon Roh; Sangwon Ryu; Gon-Ho Kim; Kye Hyun Baek; Chonghun Han (Comput. Chem. Eng., 2017)

Design of a self-tuning adaptive model predictive controller using recursive model parameter estimation for real-time plasma variable control. - Junmo Koo; Damdae Park; Sangwon Ryu; Gon-Ho Kim; Youn-Woo Lee (Comput. Chem. Eng., 2019)