The LIGA technique and its potential for microsystems-a survey. - Walter Bacher; Wolfgang Menz; Jürgen Mohr (IEEE Trans. Ind. Electron., 1995)

Testing and improvement of micro-optical-switch dynamics. - Christian Rembe; Harald Aschemann; Stefan aus der Wiesche; Eberhard P. Hofer; Hélène Debéda; Jürgen Mohr; Ulrike Wallrabe (Microelectron. Reliab., 2001)

An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography. - Zhen Ma; David M. Klymyshyn; Sven Achenbach; Martin Börner; Nina Dambrowsky; Jürgen Mohr (IEICE Trans. Electron., 2007)

A comparison of the operational models of publicly funded open access nano research infrastructures. - Susan M. Anson; Jürgen Mohr; Christian Kübel (Int. J. Technol. Manag., 2022)