Development of ultra-thinning technology for logic and memory heterogeneous stack applications. - Nobuhide Maeda; Young-Suk Kim; Y. Hikosaka; T. Eshita; Hideki Kitada; K. Fujimoto; Yoriko Mizushima; K. Suzuki; Tadao Nakamura; Akihito Kawai; Kazuhisa Arai; Takayuki Ohba (3DIC, 2011)