Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation. - E. M. Bazizi; Alban Zaka; Tom Herrmann; Francis Benistant; J. H. M. Tin; J. P. Goh; L. Jiang; M. Joshi; H. van Meer; K. Korablev (ESSDERC, 2014)