Thickness dependence on electrical and reliability properties for dense and porous low dielectric constant materials. - Kai-Chieh Kao; Chi-Jia Huang; Chang-Sian Wu; Yi-Lung Cheng (IRPS, 2015)

Electrical and reliability performance of atomic layer deposition HfO2 capping layer on porous low dielectric constant materials. - Kai-Chieh Kao; Chi-Jia Huang; Chang-Sian Wu; Yi-Lung Cheng (IRPS, 2015)