Modeling of Beams' Multiple-Contact Mode with an Application in the Design of a High-g Threshold Microaccelerometer. - Kai Li 037; Wenyuan Chen; Weiping Zhang 003 (Sensors, 2011)

Design, modeling and analysis of highly reliable capacitive microaccelerometer based on circular stepped-plate and small-area touch mode. - Kai Li 037; Wenyuan Chen; Weiping Zhang 003 (Microelectron. Reliab., 2012)