Low-capacitance Ultrathin InGaAs Membrane Photodetector on Si Slot Waveguide towards Receiver-less System. - Tomohiro Akazawa; D. Wu; Kai Sumita; N. Sekine; Makoto Okano; Kasidit Toprasertpong; Shinichi Takagi; Mitsuru Takenaka (VLSI Technology and Circuits, 2022)