Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures. - Kanishka Biswas; Soumen K. Das; S. Kal (Microelectron. J., 2006)

Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. - Kanishka Biswas; Soumen K. Das; D. K. Maurya; S. Kal; S. K. Lahiri 001 (Microelectron. J., 2006)

Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon. - Kanishka Biswas; S. Kal (Microelectron. J., 2006)

CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity. - S. Kal; Soumen K. Das; D. K. Maurya; Kanishka Biswas; Adepu Ravi Sankar; S. K. Lahiri 001 (Microelectron. J., 2006)