Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System. - Frederick Lie; Chao-Yi Huang; Chun-Sheng Wu; Kao-Tun Chen; Hung-Fei Kuo (IEEE Access, 2017)

Placement of Sub-Resolution Assist Features Based on a Genetic Algorithm. - Wei-Ming Kan; Yu-Ru Huang; Chao-Yi Huang; Chun-Sheng Wu; Kao-Tun Chen; Yu-Shin Lin; Hung-Fei Kuo (IEEE Access, 2019)