Reducing the probe ball diameters of 3D silicon-based microprobes for dimensional metrology. - N. Ferreira; A. Brennecke; Andreas Dietzel; Stephanus Büttgenbach; Thomas Krah; David Metz 002; Karin Kniel; Frank Härtig (ICST, 2013)

Coordinate measurement on wafer level - From single sensors to sensor arrays. - Thomas Krah; Achim Wedmann; Karin Kniel; Frank Härtig; N. Ferreira; Stephanus Büttgenbach (ICST, 2013)