Numerische Simulation in der Halbleiterindustrie. - R. Bulirsch; Albert Gilg; Knut Merten; Karl Steger (Inform. Forsch. Entwickl., 1990)

Method of temporary coordinate domains for moving boundary value problems [semiconductor processing simulation]. - Meinhard Paffrath; Karl Steger (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1993)