Advanced Silicon Micromachining. - Thomas Gessner; Andreas Bertz; Christian Lohmann; Steffen Kurth; Karla Hiller (Int. J. Comput. Eng. Sci., 2003)

Reliability testing of integrated low-temperature PVD PZT films. - Daniel Monteiro Diniz Reis; Sven Rzepka; Karla Hiller (Microelectron. Reliab., 2018)

Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride. - Katja Meinel; Chris Stoeckel; Marcel Melzer; Sven Zimmermann; Roman Forke; Karla Hiller; Thomas Otto (IEEE SENSORS, 2019)

Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform. - Zhi Li 089; Sai Gao; Uwe Brand; Karla Hiller; Susann Hahn; Gerry Hamdana; Erwin Peiner; Helmut Wolff; Detlef Bergmann (Sensors, 2019)

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. - Katja Meinel; Marcel Melzer; Chris Stoeckel; Alexey Shaporin; Roman Forke; Sven Zimmermann; Karla Hiller; Thomas Otto; Harald Kuhn (Sensors, 2020)

Defect-controlled Resistance Degradation of Sputtered Lead Zirconate Titanate Thin Films. - Kuan-Ting Ho; Daniel Monteiro Diniz Reis; Karla Hiller (IRPS, 2022)