Design fabrication of high-precision stage and ultrahigh-speed nanoscale positioning. - Koichi Sakata; Hiroshi Fujimoto; Atsushi Hara; Kazuaki Saiki (ACC, 2009)

Design fabrication and control of 4-DOF high-precision stage. - Koichi Sakata; Hiroshi Fujimoto; Atsushi Hara; Takeshi Ohtomo; Kazuaki Saiki (AMC, 2010)

A Study on High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control Method Based on Multirate Feedforward Control. - Kazuaki Saiki; Atsushi Hara; Koichi Sakata; Hiroshi Fujimoto (IEEE Trans. Ind. Electron., 2010)

Optimal mechanical parameter design using Self Resonance Cancellation control for gantry-type high precision stage. - Yushi Seki; Hiroshi Fujimoto; Kazuaki Saiki (AMC, 2012)

Proposal of reducing impact force control system for scan stage with decouplable structure of coarse and fine parts. - Kyota Tokuyama; Hiroshi Fujimoto; Daisuke Yumiza; Kazuaki Saiki (ICM, 2013)

Proposal of attitude control for high-precision stage by compensating nonlinearity and coupling of Euler's equation and rotational kinematics. - Wataru Ohnishi; Hiroshi Fujimoto; Koichi Sakata; Kazuhiro Suzuki; Kazuaki Saiki (IECON, 2013)

Frequency separation self resonance cancellation for vibration suppression control of a large-scale stage using multiple position sensors. - Koichi Sakata; Hiroyoshi Asaumi; Kazuyuki Hirachi; Kazuaki Saiki; Hiroshi Fujimoto (IECON, 2013)

Design and control of 6-DOF high-precision scan stage with gravity canceller. - Wataru Ohnishi; Hiroshi Fujimoto; Koichi Sakata; Kazuhiro Suzuki; Kazuaki Saiki (ACC, 2014)

Settling time shortening method using final state control for high-precision stage with decouplable structure of fine and coarse parts. - Yuma Yazaki; Hiroshi Fujimoto; Koichi Sakata; Atsushi Hara; Kazuaki Saiki (IECON, 2014)

Integrated design of mechanism and control for high-precision stages by the interaction index in the Direct Nyquist Array method. - Wataru Ohnishi; Hiroshi Fujimoto; Koichi Sakata; Kazuhiro Suzuki; Kazuaki Saiki (ACC, 2015)

Application of mode switching control using initial state variables in constraint final-state control to high-precision dual stage. - Yuma Yazaki; Hiroshi Fujimoto; Koichi Sakata; Atsushi Hara; Kazuaki Saiki (ACC, 2015)

Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators. - Wataru Ohnishi; Hiroshi Fujimoto; Koichi Sakata; Kazuhiro Suzuki; Kazuaki Saiki (AMC, 2016)

Trajectory tracking control for pneumatic actuated scan stage with time delay compensation. - Wataru Ohnishi; Hiroshi Fujimoto; Koichi Sakata; Atsushi Hara; Kazuaki Saiki (IECON, 2016)

Reduction of impact force by model prediction and final-state control for a high precision catapult stage. - Yuma Yazaki; Hiroshi Fujimoto; Koichi Sakata; Atsushi Hara; Kazuaki Saiki (IECON, 2016)