Development of Multi-Axis High-Precision Stage Using Multistep Wireless Power Transfer. - Yuma Yazaki; Wataru Ohnishi; Takehiro Imura; Hiroshi Fujimoto; Koichi Sakata; Atsushi Hara; Zhaoxiang Chen; Kazuhiro Yokovama; Kazuhiro Suzuki (IECON, 2018)