Impact of fin shape variability on device performance towards 10nm node. - Kazuyuki Tomida; Keizo Hiraga; Morin Dehan; Geert Hellings; Doyoung Jang; Kenichi Miyaguchi; Thomas Chiarella; Minsoo Kim; Anda Mocuta; Naoto Horiguchi; Abdelkarim Mercha; Diederik Verkest; et al. (ICICDT, 2015)